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Chemical Vapor Deposition of Metal and Ceramic Thin Films by Sodium Vapor Phase Reduction of Metal Halide Precursors

Published

Author(s)

Jay H. Hendricks, Michael R. Zachariah
Proceedings Title
Electrochemical Society Meeting
Conference Location
CO
Conference Title
Electrochemical Society Meeting Abstracts

Citation

Hendricks, J. and Zachariah, M. (1998), Chemical Vapor Deposition of Metal and Ceramic Thin Films by Sodium Vapor Phase Reduction of Metal Halide Precursors, Electrochemical Society Meeting, CO (Accessed April 22, 2024)
Created December 1, 1998, Updated February 17, 2017