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Chemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy

Published

Author(s)

E Potma, X. Xie, L Muntean, Jan Preusser, D J. Jones, Jun Ye, S R. Leone, E D. Hinsberg, W Schade
Citation
Journal of Physical Chemistry B
Volume
108

Citation

Potma, E. , Xie, X. , Muntean, L. , Preusser, J. , Jones, D. , Ye, J. , Leone, S. , Hinsberg, E. and Schade, W. (2004), Chemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy, Journal of Physical Chemistry B (Accessed July 26, 2024)

Issues

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Created December 31, 2003, Updated October 12, 2021