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Chemical Characterization of Silicon-Germanium Single Crystals - Initial Evaluation of the Extent of Heterogeneity

Published

Author(s)

Ryna B. Marinenko, J T. Armstrong, Shirley Turner, Eric B. Steel, F A. Stevie

Abstract

Initial heterogeneity testing with the electron microprobe using WDS of three SiGe wafers cut from single-crystal boules of different concentrations (nominally 3.5, 6.5, and 14 atomic % Ge) is described. Random and repeat samplings over the entire surfaces were used to determine the between sector (or sample), the between point, and the experimental variances. These variances were later used to calculate the overall uncertainty contribution from heterogeneity only for each specimen. In addition 2-υm and 5-υm step traverses were used to determine if heterogeneity was present over short distances. The two wafers that were higher in Ge concentration were found to be more homogeneous than the 3.5 atomic % Ge wafer.
Volume
8
Issue
Supp. 1
Conference Dates
August 5-8, 2002
Conference Location
Quebec
Conference Title
Microscopy and Microanalysis 2002

Keywords

electron microprobe, heterogeneity testing, homogeneity, SiGe, SiGe single crystals, uncertainty, variances, wavelength dispersive spectroscopy (WDS), x-ray traverses

Citation

Marinenko, R. , Armstrong, J. , Turner, S. , Steel, E. and Stevie, F. (2002), Chemical Characterization of Silicon-Germanium Single Crystals - Initial Evaluation of the Extent of Heterogeneity, Microscopy and Microanalysis 2002, Quebec, -1 (Accessed May 22, 2024)

Issues

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Created August 1, 2002, Updated February 19, 2017