Chemical Characterization of Silicon-Germanium Single Crystals - Initial Evaluation of the Extent of Heterogeneity

Published

August 1, 2002

Author(s)

Ryna B. Marinenko, J T. Armstrong, Shirley Turner, Eric B. Steel, F A. Stevie

Abstract

Initial heterogeneity testing with the electron microprobe using WDS of three SiGe wafers cut from single-crystal boules of different concentrations (nominally 3.5, 6.5, and 14 atomic % Ge) is described. Random and repeat samplings over the entire surfaces were used to determine the between sector (or sample), the between point, and the experimental variances. These variances were later used to calculate the overall uncertainty contribution from heterogeneity only for each specimen. In addition 2-υm and 5-υm step traverses were used to determine if heterogeneity was present over short distances. The two wafers that were higher in Ge concentration were found to be more homogeneous than the 3.5 atomic % Ge wafer.

Volume

8

Issue

Supp. 1

Conference Dates

August 5-8, 2002

Conference Location

Quebec

Conference Title

Microscopy and Microanalysis 2002

Pub Type

Conferences

Keywords

electron microprobe, heterogeneity testing, homogeneity, SiGe, SiGe single crystals, uncertainty, variances, wavelength dispersive spectroscopy (WDS), x-ray traverses

Citation

Marinenko, R. , Armstrong, J. , Turner, S. , Steel, E. and Stevie, F. (2002), Chemical Characterization of Silicon-Germanium Single Crystals - Initial Evaluation of the Extent of Heterogeneity, Microscopy and Microanalysis 2002, Quebec, -1 (Accessed October 26, 2025)