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Charge Trapping and Breakdown Mechanism in SIMOX

Published

Author(s)

Santos D. Mayo, John S. Suehle, Peter Roitman
Proceedings Title
Extended Abstract, Proc., 1992 IEEE International SOI Conference
Conference Dates
October 6-8, 1992
Conference Location
Ponte Vedra Beach, FL, USA

Citation

Mayo, S. , Suehle, J. and Roitman, P. (1992), Charge Trapping and Breakdown Mechanism in SIMOX, Extended Abstract, Proc., 1992 IEEE International SOI Conference, Ponte Vedra Beach, FL, USA (Accessed May 20, 2024)

Issues

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Created December 30, 1992, Updated October 12, 2021