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Characterizing Pattered Block Copolymer Thin Films with Soft X-rays

Published

Author(s)

Daniel F. Sunday, Jiaxing Ren, Christopher D. Liman, Lance Williamson, Roel Gronheid, Paul Nealey, Regis J. Kline
Citation
ACS Applied Materials and Interfaces

Citation

Sunday, D. , Ren, J. , Liman, C. , Williamson, L. , Gronheid, R. , Nealey, P. and Kline, R. (2017), Characterizing Pattered Block Copolymer Thin Films with Soft X-rays, ACS Applied Materials and Interfaces, [online], https://doi.org/10.1021/acsami.7b02791 (Accessed May 25, 2022)
Created September 20, 2017, Updated January 27, 2020