Hedden, R.
, Lee, V.
, Soles, C.
and Bauer, B.
(2004),
Characterization of Pore Structure in a Nanoporous Low-Dielectric Constant Thin Film by Neutron Scattering Porosimetry and X-ray Porosimetry, Langmuir, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853934
(Accessed October 10, 2024)
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Characterization of Pore Structure in a Nanoporous Low-Dielectric Constant Thin Film by Neutron Scattering Porosimetry and X-ray Porosimetry
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Author(s)
, V. J. Lee, ,
Citation
Langmuir
Volume
ASAP(on-line)
Pub Type
Journals
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Keywords
Electronic Materials, Thin Films, film density, neutron scattering porosimetry, porosimetry, porous low-k dielectric material, small-angle neutron scattering, x-ray porosimetry
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Issues
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Created January 1, 2004, Updated February 17, 2017