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Characterization of the In-Plane Structure of Buried Interfaces by Off-Specular X-Ray and Neutron Reflectometry

Published

Author(s)

Kristopher Lavery, Vivek M. Prabhu, Eric K. Lin, Wen-Li Wu, Kwang-Woo Choi, Sushil K. Satija, M Wormington

Abstract

Off-specular reflectivity, or diffuse scattering, probes the lateral compositional variations at surfaces and interfaces. Of particular interest is the characterization at buried interfaces for the form and amplitude of roughness. Recent advances in modeling of the diffuse scattering proposes that contributions from physical roughness (topology) and gradients may be distinguished. Model substrates and buried interfaces were examined by a combination of neutron and x-ray off-specular reflectivity and atomic force microscopy to address these challenges. These three complementary methods, with different contrast mechanisms, highlight diffuse scattering as a versatile method to characterize buried interfacial structure.
Citation
Applied Physics Letters
Volume
92

Keywords

off-specular reflectivity, polymer thin films, refectometry, roughness, surfaces and interfaces

Citation

Lavery, K. , Prabhu, V. , Lin, E. , Wu, W. , Choi, K. , Satija, S. and Wormington, M. (2008), Characterization of the In-Plane Structure of Buried Interfaces by Off-Specular X-Ray and Neutron Reflectometry, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852736 (Accessed February 28, 2024)
Created February 14, 2008, Updated February 19, 2017