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Characterization of Interface Defects in SIMOX Films

Published

Author(s)

Santos D. Mayo, J R. Lowney, Peter Roitman
Citation
Journal of Electronic Materials
Volume
22
Issue
2

Citation

Mayo, S. , Lowney, J. and Roitman, P. (1993), Characterization of Interface Defects in SIMOX Films, Journal of Electronic Materials (Accessed April 14, 2024)
Created December 30, 1993, Updated October 12, 2021