Mayo, S.
, Lowney, J.
and Roitman, P.
(1993),
Characterization of Interface Defects in SIMOX Films, Journal of Electronic Materials
(Accessed March 27, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Characterization of Interface Defects in SIMOX Films
Published
Author(s)
, ,
Citation
Journal of Electronic Materials
Volume
22
Issue
2
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1993, Updated October 12, 2021