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In Chamber Thermometry Calibration Using A Si Proof Wafer

Published

Author(s)

B Tsai, J Lovas f, D P. Dewitt, Kenneth G. Kreider, Burns g
Proceedings Title
5th International Conference on Advanced Thermal Processing of Semiconductors
Volume
5
Conference Dates
September 3-5, 1997
Conference Location
New Orleans, LA, USA
Conference Title
Proceedings of the 5th International Conference on Advanced Thermal Processing of Semiconductors

Citation

Tsai, B. , Lovas f, J. , DeWitt, D. , Kreider, K. and Burns g, B. (1997), In Chamber Thermometry Calibration Using A Si Proof Wafer, 5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA, USA (Accessed March 2, 2024)
Created September 2, 1997, Updated October 12, 2021