Tsai, B.
, Lovas f, J.
, DeWitt, D.
, Kreider, K.
and Burns g, B.
(1997),
In Chamber Thermometry Calibration Using A Si Proof Wafer, 5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA, USA
(Accessed July 27, 2024)
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In Chamber Thermometry Calibration Using A Si Proof Wafer
Published
Author(s)
B Tsai, J Lovas f, D P. Dewitt, , Burns g
Proceedings Title
5th International Conference on Advanced Thermal Processing of Semiconductors
Volume
5
Conference Dates
September 3-5, 1997
Conference Location
New Orleans, LA, USA
Conference Title
Proceedings of the 5th International Conference on Advanced Thermal Processing of Semiconductors
Pub Type
Conferences
Citation
Issues
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Created September 2, 1997, Updated October 12, 2021