Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Calibration Wafer for Temperature Measurements in RTP Tools

Published

Author(s)

Kenneth G. Kreider, D P. Dewitt, B K. Tsai, F J. Lovas, D W. Allen
Citation
Characterization and Metrology for ULSI Technology
Publisher Info
AIP, Woodbury, NY

Citation

Kreider, K. , DeWitt, D. , Tsai, B. , Lovas, F. and Allen, D. (1998), Calibration Wafer for Temperature Measurements in RTP Tools, AIP, Woodbury, NY (Accessed June 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 1, 1998, Updated February 17, 2017