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Calibration Wafer for Temperature Measurements in RTP Tools



Kenneth G. Kreider, D P. Dewitt, B K. Tsai, F J. Lovas, D W. Allen
Characterization and Metrology for ULSI Technology
Publisher Info
AIP, Woodbury, NY


Kreider, K. , DeWitt, D. , Tsai, B. , Lovas, F. and Allen, D. (1998), Calibration Wafer for Temperature Measurements in RTP Tools, AIP, Woodbury, NY (Accessed June 14, 2024)


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Created December 1, 1998, Updated February 17, 2017