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Calibration of Piezoresistive Cantilever Force Sensors Using the NIST Electrostatic Force Balance

Published

Author(s)

Jon R. Pratt, David B. Newell, John A. Kramar, Eric P. Whitenton

Abstract

The characterization of material properties and mechanical performance of micro-electromechanical devices often hinges on the accurate measurement of small forces.  Calibrated load cells of appropriate size and range are used, but are often not calibrated in a fashion traceable to the International System of Units (SI). Recently, we calibrated a piezoresistive cantilever in terms of SI force sensitivity.  Here, we employ this device as a secondary force standard to calibrate another, optical lever based sensor in a force probe instrument, demonstrating an unbroken traceability chain to appropriate national standards.
Proceedings Title
Proceedings of the IMECE'03: 2003 ASME International Mechanical Engineering Congress & Exposition
Conference Dates
November 16-21, 2003
Conference Location
Washington , DC, USA
Conference Title
IMECE'03: 2003 ASME International Mechanical Engineering Congress & Exposition

Keywords

micro-electromechanical

Citation

Pratt, J. , Newell, D. , Kramar, J. and Whitenton, E. (2003), Calibration of Piezoresistive Cantilever Force Sensors Using the NIST Electrostatic Force Balance, Proceedings of the IMECE'03: 2003 ASME International Mechanical Engineering Congress & Exposition, Washington , DC, USA (Accessed April 16, 2024)
Created November 15, 2003, Updated October 12, 2021