@conference{840811, author = {Jon Pratt and David Newell and John Kramar and Eric Whitenton}, title = {Calibration of Piezoresistive Cantilever Force Sensors Using the NIST Electrostatic Force Balance}, year = {2003}, month = {2003-11-16 00:11:00}, publisher = {Proceedings of the IMECE'03: 2003 ASME International Mechanical Engineering Congress & Exposition, Washington , DC, USA}, language = {en}, }