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Broadband Characterization of Multilayer Dielectric Thin-Films



Nathan D. Orloff, Jordi Mateu, Makoto Murakami, Ichiro Takeuchi, James C. Booth


We develop a measurement technique for obtaining the broadband complex permittivity of thin-film dielectric materials over the frequency range from 100 Hz-40 GHz. Such broad frequency coverage can only be accomplishe3d by combining lumped-element and distributed devices, and is implemented int his technique using planar capacitors and transmission lines. We experimentally determine the capacitance and conductance per unit lenght for these different structures fabricated ont he same thin-film samples, and extract consisent values for the relative permittivity throught the use of detailed finite-element simulations. We demonstrate the utility of this technique by applying it to study the frequency dependence of the dielectric response of ferroelectric, ferromagnetic, and multiferroic thin film samples.
Conference Dates
June 3-8, 2007
Conference Location
Honolulu, HI
Conference Title
Microwave Symposium, 2007. IEEE/MTT-S International


broadband, multiferroic, PbTiO3, thin-films


Orloff, N. , Mateu, J. , Murakami, M. , Takeuchi, I. and Booth, J. (2007), Broadband Characterization of Multilayer Dielectric Thin-Films, Microwave Symposium, 2007. IEEE/MTT-S International, Honolulu, HI, [online], (Accessed April 15, 2024)
Created June 3, 2007, Updated January 27, 2020