@conference{209746, author = {Nathan Orloff and Jordi Mateu and Makoto Murakami and Ichiro Takeuchi and James Booth}, title = {Broadband Characterization of Multilayer Dielectric Thin-Films}, year = {2007}, month = {2007-06-03}, publisher = {Microwave Symposium, 2007. IEEE/MTT-S International, Honolulu, HI}, doi = {https://doi.org/10.1109/MWSYM.2007.380340}, language = {en}, }