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Broadband Characterization of High-Dielectric Constant Films for Power-Ground Decoupling

Published

Author(s)

Jan Obrzut, R Nozaki

Abstract

We evaluated the broadband dielectric permittivity and impedance characteristics of high dielectric constant films for decoupling capacitance applications at frequencies of 100 GHz to 10 GHz. In order to extend the measurements to the microwave range, we developed an appropriate expression for the input admittance of a thin-film capacitance terminating a coaxial line. The theoretical model treats the capacitance as a distributed network and correlates the network scattering parameter with complex permittivity of the specimen. The method eliminates the systematic uncertainties of the lumped element approximations and is suitable for high-frequency characterization of low-impedance substrates.
Citation
IEEE Transactions on Instrumentation and Measurement
Volume
51
Issue
No. 4

Keywords

broadband measurements, coaxial discontinuity, decoupling capacitance, dielectric films, dielectric permittivity, microwave characterization, permittivity, TDR

Citation

Obrzut, J. and Nozaki, R. (2002), Broadband Characterization of High-Dielectric Constant Films for Power-Ground Decoupling, IEEE Transactions on Instrumentation and Measurement, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851740 (Accessed May 28, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created August 1, 2002, Updated February 17, 2017