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Atom Probe Tomography using Extreme Ultraviolet Light

Published

Author(s)

Luis Miaja Avila, Ann C. Chiaramonti Debay, Paul T. Blanchard, Norman A. Sanford, David R. Diercks, Brian Gorman
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics: 2019
Conference Dates
April 2-4, 2019
Conference Location
Monterey, CA

Citation

Miaja, L. , Chiaramonti, A. , Blanchard, P. , Sanford, N. , Diercks, D. and Gorman, B. (2019), Atom Probe Tomography using Extreme Ultraviolet Light, Frontiers of Characterization and Metrology for Nanoelectronics: 2019, Monterey, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927229 (Accessed June 25, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 3, 2019, Updated January 23, 2020