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The Approaching Revolution in X-Ray Microanalysis: The Microcalorimeter Energy Dispersive Spectrometer

Published

Author(s)

Dale E. Newbury, David A. Wollman, Gene C. Hilton, Kent D. Irwin, Norman F. Bergren, David A. Rudman, John M. Martinis

Abstract

We have developed a high-resolution energy-dispersive x-ray spectrometer (EDS) based on cryogenic microcalorimeter x-ray detectors for use in x-ray microanalysis. With an energy resolution of 3 eV at 1.5 keV, count rate of {approximately} 500 s-1, and an effective collection area of {approximately} 5 mm2 (using polycapillary x-ray optics), the microcalorimeter EDS combines many of the favorable qualities of commercially-available wavelength dispersive spectrometers (WDS) and semiconductor EDS. After describing the spectrometer system, we present several applications of microcalorimeter EDS to important microanalysis problems.
Citation
Journal of Radioanalytical and Nuclear Chemistry
Volume
244
Issue
No. 3

Keywords

electron probe x-ray microanalysis, energy dispersive spectrometry, microbeam analysis, microcalorimetry

Citation

Newbury, D. , Wollman, D. , Hilton, G. , Irwin, K. , Bergren, N. , Rudman, D. and Martinis, J. (2000), The Approaching Revolution in X-Ray Microanalysis: The Microcalorimeter Energy Dispersive Spectrometer, Journal of Radioanalytical and Nuclear Chemistry (Accessed July 15, 2024)

Issues

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Created June 1, 2000, Updated February 17, 2017