NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.
Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.
An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
The Approaching Revolution in X-Ray Microanalysis: The Microcalorimeter Energy Dispersive Spectrometer
Published
Author(s)
Dale E. Newbury, David A. Wollman, Gene C. Hilton, Kent D. Irwin, Norman F. Bergren, David A. Rudman, John M. Martinis
Abstract
We have developed a high-resolution energy-dispersive x-ray spectrometer (EDS) based on cryogenic microcalorimeter x-ray detectors for use in x-ray microanalysis. With an energy resolution of 3 eV at 1.5 keV, count rate of {approximately} 500 s-1, and an effective collection area of {approximately} 5 mm2 (using polycapillary x-ray optics), the microcalorimeter EDS combines many of the favorable qualities of commercially-available wavelength dispersive spectrometers (WDS) and semiconductor EDS. After describing the spectrometer system, we present several applications of microcalorimeter EDS to important microanalysis problems.
Citation
Journal of Radioanalytical and Nuclear Chemistry
Volume
244
Issue
No. 3
Pub Type
Journals
Keywords
electron probe x-ray microanalysis, energy dispersive spectrometry, microbeam analysis, microcalorimetry
Citation
Newbury, D.
, Wollman, D.
, Hilton, G.
, Irwin, K.
, Bergren, N.
, Rudman, D.
and Martinis, J.
(2000),
The Approaching Revolution in X-Ray Microanalysis: The Microcalorimeter Energy Dispersive Spectrometer, Journal of Radioanalytical and Nuclear Chemistry
(Accessed October 8, 2025)