Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Application of ALD High-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories

Published

Author(s)

Xiaoxiao Zhu, H Gu, Qiliang Li, Helmut Baumgart, D. E. Ioannou, John S. Suehle, Curt Richter

Citation

Zhu, X. , Gu, H. , Li, Q. , Baumgart, H. , Ioannou, D. , Suehle, J. and Richter, C. (2009), Application of ALD High-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories (Accessed May 19, 2026)
Additional citation formats

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 6, 2009, Updated May 7, 2026
Was this page helpful?