Antenna-Coupled Niobium Bolometers for MM-Wave Imaging Arrays
Shalva Nolen, Jonathan A. Koch, Nicholas Paulter, Carl D. Reintsema, Erich N. Grossman
Antenna-coupled thin-film niobium microbolometers designed for mm-wave imaging arrays have been fabricated and their electrical properties measured. The niobium bolometers are operated at room temperature and are located at the feeds of half-wave dipole antennas on an electrically thick silicon substrate. We independently measured the resistance of the microbolometers as a function of temperature and the dynamic resistance as a function of DC bias current yielding the electrical responsivity and thermal conductance of the bolometers. The latter is dominated by conduction through a deposited SiO2 isolation layer. We describe electrical measurements of the bolometers pulse response and noise, performed by illuminating the bolometers with a high power, pulsed mm-wave source. We discuss these measurements in the context of the pulsed detection architecture planned for an active mm-wave imaging system currently under development.
1999 Intl. Symp. on Optical Science, Eng. and Instrum., SPIE Proc. Conf. on Terahertz and Gigahertz Photonics
, Koch, J.
, Paulter, N.
, Reintsema, C.
and Grossman, E.
Antenna-Coupled Niobium Bolometers for MM-Wave Imaging Arrays, 1999 Intl. Symp. on Optical Science, Eng. and Instrum., SPIE Proc. Conf. on Terahertz and Gigahertz Photonics, Denver, CO, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16457
(Accessed September 28, 2023)