Anomalies Observed in Wafer Level Microwave Testing

Published

July 10, 1991

Author(s)

Dylan F. Williams, Roger Marks, T H. Miers, A Cangellaris

Abstract

Two anomalies have been observed in the course of developing planar wafer level standards for the testing of GaAs monolithic microwave integrated circuits. The first involves a low-frequency characteristic impedance change of microstrip and coplanar waveguide transmission lines. This effect, which is due to conductor loss of the transmission media, can result in improper/inaccurate calibrations and measurements. The second anomaly results from resonant coupling of the microwave probe into adjacent structures on the wafer. This can occur during calibration or measurement and results in extreme inaccuracies at the resonant frequencies. Methods to eliminate these anomalies are addressed.

Proceedings Title

IEEE MTT-S International

Volume

3

Conference Dates

July 10-14, 1991

Conference Location

Boston, MA

Conference Title

1991 Microwave Symposium Digest, IEEE MTT-S International

Pub Type

Conferences

Download Paper

https://doi.org/10.1109/MWSYM.1991.147213

Citation

Williams, D. , Marks, R. , Miers, T. and Cangellaris, A. (1991), Anomalies Observed in Wafer Level Microwave Testing, IEEE MTT-S International, Boston, MA, [online], https://doi.org/10.1109/MWSYM.1991.147213 (Accessed October 20, 2025)