Gallagher, A.
, Howling, A.
and Hollenstein, C.
(2002),
Anion reactions in silane plasma, Journal of Applied Physics
(Accessed June 9, 2023)
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Anion reactions in silane plasma
Published
Author(s)
A Gallagher, A A. Howling, C Hollenstein
Citation
Journal of Applied Physics
Volume
91
Pub Type
Journals
Citation
Created January 1, 2002, Updated February 17, 2017