Gallagher, A.
, Howling, A.
and Hollenstein, C.
(2002),
Anion reactions in silane plasma, Journal of Applied Physics
(Accessed December 14, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Anion reactions in silane plasma
Published
Author(s)
A Gallagher, A A. Howling, C Hollenstein
Citation
Journal of Applied Physics
Volume
91
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2002, Updated February 17, 2017