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Anion reactions in silane plasma

Published

Author(s)

A Gallagher, A A. Howling, C Hollenstein
Citation
Journal of Applied Physics
Volume
91

Citation

Gallagher, A. , Howling, A. and Hollenstein, C. (2002), Anion reactions in silane plasma, Journal of Applied Physics (Accessed April 14, 2024)
Created January 1, 2002, Updated February 17, 2017