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ANALYSYS AND PROTOCOL FOR CHARACTERIZING INTRINSIC PROPERTIES OF THREE-AXIS MEMS ACCELEROMETERS USING A GIMBAL ROTATED IN THE GRAVITATIONAL FIELD

Published

Author(s)

Michael Gaitan, Muhammad Y. Afridi, Jon C. Geist

Abstract

Three-axis MEMS accelerometers are typically characterized in terms of their cross-sensitivity matrix. We present an analysis and protocol to characterize them in terms of their intrinsic properties, which we define as the responsivity of each accelerometer along its axis of maximum response in a gravitational field and the angles between each of these axes. An analysis and test protocol is developed to determine these properties using a gimbal to rotate each axis of the device orthogonally to the gravitational field. We propose that this approach is better suited for laboratory inter-comparisons.
Conference Dates
May 30-June 1, 2017
Conference Location
Helsinki
Conference Title
IMEKO 23rd TC3, 13th TC5 and 4th TC22 International Conference

Keywords

MEMS, Microelectromechanical Systems, Accelerometer, Intrinsic, Calibration

Citation

Gaitan, M. , Afridi, M. and Geist, J. (2017), ANALYSYS AND PROTOCOL FOR CHARACTERIZING INTRINSIC PROPERTIES OF THREE-AXIS MEMS ACCELEROMETERS USING A GIMBAL ROTATED IN THE GRAVITATIONAL FIELD, IMEKO 23rd TC3, 13th TC5 and 4th TC22 International Conference, Helsinki, -1 (Accessed April 21, 2024)
Created May 30, 2017, Updated July 27, 2017