Tighe, N.
(1982),
Analysis of oxide and oxidematrix interfaces in silicon nitride:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.82-2574 (Accessed May 18, 2026)
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Analysis of oxide and oxidematrix interfaces in silicon nitride:
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- NBS IR 82-2574
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NBS IR 82-2574
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NIST Pubs
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Created January 1, 1982, Updated May 19, 2023