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Analysis of Fixed-Fixed Beam Test Structures

Published

Author(s)

Janet M. Cassard, David T. Read, Michael Gaitan
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II
Volume
2880
Conference Dates
October 14-15, 1996
Conference Location
Austin, TX, USA

Citation

Cassard, J. , Read, D. and Gaitan, M. (1996), Analysis of Fixed-Fixed Beam Test Structures, Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II, Austin, TX, USA (Accessed June 23, 2024)

Issues

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Created December 30, 1996, Updated October 12, 2021