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PUBLICATIONS

Analysis of Fixed-Fixed Beam Test Structures

Published

Author(s)

Janet M. Cassard, David T. Read, Michael Gaitan
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II
Volume
2880
Conference Dates
October 14-15, 1996
Conference Location
Austin, TX, USA
Pub Type
Conferences

Citation

Cassard, J. , Read, D. and Gaitan, M. (1996), Analysis of Fixed-Fixed Beam Test Structures, Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II, Austin, TX, USA (Accessed October 17, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1996, Updated October 12, 2021
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