Advancing Factory-Wide Data Quality for APC Applications

Published

November 30, 2006

Author(s)

Harvey Wohlwend, Gino Crispieri, Ya-Shian Li-Baboud

Abstract

Accurate clock synchronization and time stamping plays a significant role in ensuring data quality as the semiconductor industry faces an imminent data explosion with the deployment of Interface A. Standards and Guidelines significantly ease the deployment of factory-wide distributed system synchronization where many pieces of equipment and applications from a variety of vendors exist. The SEMI Time Synchronization Working Group identified the industry?s critical timing requirements and addressed the challenges by developing new standards and guidelines while ensuring legacy standards can adopt the new standard and maintain backwards compatibility. This presentation provides insight to the motivations and key concepts for a time synchronization standard and reports on experiences doing evaluations of Interface A implementations. These experiences highlight additional insights possible with Interface A, including the internal sensor data value refresh rate. Interface A provides finer data collection granularity, more visibility into the data, and a window into the industry?s data quality issues.

Proceedings Title

AEC/APC Symposium-Asia

Conference Dates

November 30-December 1, 2006

Conference Location

Taipei, 1, TW

Pub Type

Conferences

Download Paper

Local Download

Keywords

advanced process control, data quality, time synchronization, time-stamping

Citation

Wohlwend, H. , Crispieri, G. and Li-Baboud, Y. (2006), Advancing Factory-Wide Data Quality for APC Applications, AEC/APC Symposium-Asia, Taipei, 1, TW, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32533 (Accessed May 3, 2024)