@conference{773871,
  author = {Harvey Wohlwend and Gino Crispieri and Ya-Shian Li-Baboud},
  title = {Advancing Factory-Wide Data Quality for APC Applications},
  year = {2006},
  month = {2006-11-30 00:11:00},
  publisher = {AEC/APC Symposium-Asia, Taipei, 1, TW},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32533},
  language = {en},
}