Cizmar, P.
, Vladar, A.
and Postek, M.
(2010),
Advances in Modeling of Scanning Charged-Particle-Microscopy Images, 2010 SCANNING/SPIE Proceedings, Monterey, CA
(Accessed October 13, 2024)
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Advances in Modeling of Scanning Charged-Particle-Microscopy Images
Published
Author(s)
, ,
Abstract
Modeling scanning electron microscope (SEM) and scanning ion microscope images has recently become necessary, because of its ability to provide repeatable images with a priori determined parameters. Modeled artificial images have been used in evaluation of new imaging and metrological techniques, like image-sharpness calculation, or drift-corrected image composition (DCIC). Originally, the artificial image generator was designed only to generate the SEM images of gold-on-carbon resolution sample for image-sharpness evaluation. Since then, the new improved version of the software was written in C++. The current version of the software can generate arbitrary samples, any drift function, and many other features. This work describes scanning in charged-particle microscopes, which is applied both in the artificial image generator and the DCIC technique. As an example, the performance of the DCIC technique is demonstrated.Proceedings Title
2010 SCANNING/SPIE Proceedings
Volume
7729
Conference Dates
May 17-19, 2010
Conference Location
Monterey, CA
Conference Title
2010 SCANNING/SPIE
Pub Type
Conferences
Keywords
SEM, nanoscale, metrology, drift, correction, imaging
Citation
Issues
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Created September 19, 2010, Updated February 19, 2017