Advances in Modeling of Scanning Charged-Particle-Microscopy Images
Petr Cizmar, Andras Vladar, Michael T. Postek
Modeling scanning electron microscope (SEM) and scanning ion microscope images has recently become necessary, because of its ability to provide repeatable images with a priori determined parameters. Modeled artificial images have been used in evaluation of new imaging and metrological techniques, like image-sharpness calculation, or drift-corrected image composition (DCIC). Originally, the artificial image generator was designed only to generate the SEM images of gold-on-carbon resolution sample for image-sharpness evaluation. Since then, the new improved version of the software was written in C++. The current version of the software can generate arbitrary samples, any drift function, and many other features. This work describes scanning in charged-particle microscopes, which is applied both in the artificial image generator and the DCIC technique. As an example, the performance of the DCIC technique is demonstrated.
2010 SCANNING/SPIE Proceedings
May 17-19, 2010
SEM, nanoscale, metrology, drift, correction, imaging