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Advanced Image Composition with Intra-Frame Drift Correction

Published

Author(s)

Petr Cizmar, Andras Vladar, Michael T. Postek

Abstract

Drift Corrected Image Composition (DCIC) is a real-time technique that allows for acquiring significantly more accurate images compare to traditional slow or fast imaging methods.[Ref.] It is especially useful in nanometer-scale imaging and metrology. Further improvement is now possible by adding intra-frame drift correction as an additional step in image-frame processing before the final composition. The idea is applying correction for drift-related distortions within in the individual frames, which are used in the composition if the final image. This is important especially for the metrological applications in nano-scale. This intra-frame drift correction requires knowledge of dead times. This work proposes two possible approaches, on how the dead times can be found.
Proceedings Title
Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
Volume
8036
Conference Dates
April 25-29, 2011
Conference Location
Orlando, FL

Keywords

drift correction, imaging, metrology

Citation

Cizmar, P. , Vladar, A. and Postek, M. (2011), Advanced Image Composition with Intra-Frame Drift Correction, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, Orlando, FL (Accessed March 5, 2024)
Created July 19, 2011, Updated February 19, 2017