Accurate Size Measurement of Monosize Calibration Spheres by Differential Mobility Analysis

Published

March 1, 1998

Author(s)

George W. Mulholland, Marco G. Fernandez

Abstract

A differential mobility analyzer was used to measure the mean particle size of three monosize suspensions of polystyrene spheres in water. Key features of the experiment to minimize the uncertainty in the results include developing a recirculating flow to ensure equal flows into and out of the classifier, an accurate divider circuit for calibrating the electrode voltage, and use of the 100.7 nm NIST SRM for calibrating the flow of the classifier. The measured average sizes and expanded uncertainties with a coverage factor of 2 are 92.4 mn + 1.1 nm, 126.9 nm + 1.4 nm, and 217.7 nm + 3.4 nm. These calibration sizes were characterized by NIST to improve the calibration of scanning surface inspection systems

Proceedings Title

American Institute of Physics

Conference Dates

March 1, 1998

Conference Location

Gaithersburg, MD

Conference Title

Characterization and Metrology for ULSI Technology

Pub Type

Conferences

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Keywords

mobility, particle size, polystyrene

Citation

Mulholland, G. and Fernandez, M. (1998), Accurate Size Measurement of Monosize Calibration Spheres by Differential Mobility Analysis, American Institute of Physics, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916579 (Accessed April 19, 2024)