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Accurate Size Measurement of Monosize Calibration Spheres by Differential Mobility Analysis

Published

Author(s)

George W. Mulholland, Marco G. Fernandez

Abstract

A differential mobility analyzer was used to measure the mean particle size of three monosize suspensions of polystyrene spheres in water. Key features of the experiment to minimize the uncertainty in the results include developing a recirculating flow to ensure equal flows into and out of the classifier, an accurate divider circuit for calibrating the electrode voltage, and use of the 100.7 nm NIST SRM for calibrating the flow of the classifier. The measured average sizes and expanded uncertainties with a coverage factor of 2 are 92.4 mn + 1.1 nm, 126.9 nm + 1.4 nm, and 217.7 nm + 3.4 nm. These calibration sizes were characterized by NIST to improve the calibration of scanning surface inspection systems
Proceedings Title
American Institute of Physics
Conference Dates
March 1, 1998
Conference Location
Gaithersburg, MD
Conference Title
Characterization and Metrology for ULSI Technology

Keywords

mobility, particle size, polystyrene

Citation

Mulholland, G. and Fernandez, M. (1998), Accurate Size Measurement of Monosize Calibration Spheres by Differential Mobility Analysis, American Institute of Physics, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916579 (Accessed March 1, 2024)
Created March 1, 1998, Updated February 17, 2017