Green, O.
, Bao, Y.
, Lawall, J.
, Gorman, J.
and Barker, D.
(2025),
Accurate, precise pressure sensing with tethered optomechanics, Physical Review Applied, [online], https://doi.org/10.1103/9dtb-sk2j, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958374
(Accessed September 14, 2025)
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Accurate, precise pressure sensing with tethered optomechanics
Published
Author(s)
Olivia Green, , , ,
Abstract
We show that optomechanical pressure sensors with characterized density and thickness can achieve uncertainty as low as 1.1 % via comparison with a secondary pressure standard. The agreement between the secondary standard and our optomechanical sensors is a necessary step toward using optomechanical devices as primary pressure sensors. Our silicon nitride and silicon carbide sensors are short-term and long-term stable, displaying Allan deviations compatible with better than 1 % precision and baseline drift significantly lower than the secondary standard. Our measurements also yield the in situ thin-film density of our sensors with 1 % total uncertainty or lower, aiding development of other optomechanical sensors. Our results demonstrate that optomechanical pressure sensors can achieve accuracy, precision, and drift sufficient to replace high-performance legacy pressure gauges.Citation
Physical Review Applied
Volume
24
Pub Type
Journals
Download Paper
Keywords
optomechanics, vacuum metrology, pressure metrology
Citation
Issues
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Created August 28, 2025, Updated September 9, 2025