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Accurate Measurements of Thermodynamic and Transport Properties of Industrial Gases with Acoustic Resonators.

Published

Author(s)

Keith A. Gillis, John J. Hurly, Michael R. Moldover

Abstract

Acoustic resonators have been developed at NIST as tools to measure the thermodynamic and transport properties of gases. High Q cylindrical acoustic resonators are routinely used to measure the speed of sound in gases with uncertainties of 0.01% or less. Model intermolecular potentials are fitted to the acoustic data to obtain virial coefficients, gas densities (rho), and heat capacities Cp with uncertainties of 0.1% as well as estimates of the viscosity (eta) and thermal conductivity (lamda) with uncertainties of less that 10%. The viscosity is measured directly with uncertainties of less than 1% using the Greenspan acoustic viscometer, a novel acoustic resonator developed at NIST. A novel resonator is used to measure the Prandtl number (Pr =eta.Cp/lamda) with uncertainties of about 2%. This paper summarizes our work with these resonators and their applications to numerous gases including very reactive gases used in semiconductor processing.
Proceedings Title
Proceedings of the 17th International Congress on Acoustics, editor Adriano Alippi, v.4 Measurement techniques and transducers
Volume
4
Conference Dates
September 2-7, 2001
Conference Location
Rome
Conference Title
17th International Congress on Acoustics

Keywords

acoustic resonators, Greenspan viscometer, heat capacity, industrial gases, Prantl number, speed of sound, thermodynamic properties, transport properties

Citation

Gillis, K. , Hurly, J. and Moldover, M. (2001), Accurate Measurements of Thermodynamic and Transport Properties of Industrial Gases with Acoustic Resonators., Proceedings of the 17th International Congress on Acoustics, editor Adriano Alippi, v.4 Measurement techniques and transducers, Rome, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830760 (Accessed April 14, 2024)
Created September 2, 2001, Updated February 19, 2017