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Accurate Force Measurements for Miniature Mechanical Systems: A Review of Progress

Published

Author(s)

Lowell P. Howard, Joseph Fu

Abstract

A survey of nanonewton force calibration techniques suitable for micro-electromechanical systems (MEMS) is presented. The reviewed techniques include: mass-derived force, pendulums, calibrated master spings, resonance and electromagnetic techniques. Considerable background material is provided to support the hypothesis that virtual power methods, such as those employed on the NIST watt balance, are applicable to the MEMS force calibration problem. A review of progress at NIST on two prototype nanowatt balances designed for MEMS calibration is given.
Proceedings Title
Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors
Volume
3225
Conference Dates
September 29, 1997
Conference Location
Austin, TX, USA
Conference Title
Micrometrology Techniques

Keywords

AFM, force measurement, MEMS, nanonewton

Citation

Howard, L. and Fu, J. (1997), Accurate Force Measurements for Miniature Mechanical Systems: A Review of Progress, Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors, Austin, TX, USA (Accessed June 20, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created August 31, 1997, Updated October 12, 2021