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An ac Impedance Method for High-Resistivity Measurements of Silicon
Published
Author(s)
W. R. Thurber, J R. Lowney, Robert D. Larrabee, P. Talwar, James R. Ehrstein
Proceedings Title
Extended Abstracts of the Electrochemical Society
Conference Dates
May 7-12, 1989
Conference Location
Los Angeles, CA, USA
Pub Type
Conferences
Citation
Thurber, W.
, Lowney, J.
, Larrabee, R.
, Talwar, P.
and Ehrstein, J.
(1989),
An ac Impedance Method for High-Resistivity Measurements of Silicon, Extended Abstracts of the Electrochemical Society, Los Angeles, CA, USA
(Accessed October 17, 2025)