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An ac Impedance Method for High-Resistivity Measurements of Silicon

Published

Author(s)

W. R. Thurber, J R. Lowney, Robert D. Larrabee, P. Talwar, James R. Ehrstein
Proceedings Title
Extended Abstracts of the Electrochemical Society
Conference Dates
May 7-12, 1989
Conference Location
Los Angeles, CA, USA

Citation

Thurber, W. , Lowney, J. , Larrabee, R. , Talwar, P. and Ehrstein, J. (1989), An ac Impedance Method for High-Resistivity Measurements of Silicon, Extended Abstracts of the Electrochemical Society, Los Angeles, CA, USA (Accessed June 24, 2024)

Issues

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Created December 30, 1989, Updated October 12, 2021