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2013 ITRS Metrology Roadmap

Published

Author(s)

Alain C. Diebold, Ndubuisi George Orji

Abstract

In 2013 the ITRS Metrology Technical Working Group worked on updating the text and tables of the metrology chapter. New additions include a section on 3D nanometrology, a revised lithography metrology table, and an updated Interconnect section. The difficult challenges table was revised to reflect current metrology needs and opportunities. This article discusses the new updates for 2013.
Citation
Apptheneum

Keywords

ITRS, Metrology, Roadmap, Lithography

Citation

Diebold, A. and Orji, N. (2014), 2013 ITRS Metrology Roadmap, Apptheneum, [online], www.apptheneum.com (Accessed April 14, 2024)
Created April 14, 2014, Updated October 12, 2021