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2013 ITRS Metrology Roadmap



Alain C. Diebold, Ndubuisi George Orji


In 2013 the ITRS Metrology Technical Working Group worked on updating the text and tables of the metrology chapter. New additions include a section on 3D nanometrology, a revised lithography metrology table, and an updated Interconnect section. The difficult challenges table was revised to reflect current metrology needs and opportunities. This article discusses the new updates for 2013.


ITRS, Metrology, Roadmap, Lithography


Diebold, A. and Orji, N. (2014), 2013 ITRS Metrology Roadmap, Apptheneum, [online], (Accessed April 14, 2024)
Created April 14, 2014, Updated October 12, 2021