Diebold, A.
and Orji, N.
(2014),
2013 ITRS Metrology Roadmap, Apptheneum, [online], www.apptheneum.com
(Accessed June 29, 2025)
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2013 ITRS Metrology Roadmap
Published
Author(s)
Alain C. Diebold,
Abstract
In 2013 the ITRS Metrology Technical Working Group worked on updating the text and tables of the metrology chapter. New additions include a section on 3D nanometrology, a revised lithography metrology table, and an updated Interconnect section. The difficult challenges table was revised to reflect current metrology needs and opportunities. This article discusses the new updates for 2013.Citation
Apptheneum
Pub Type
Websites
Keywords
ITRS, Metrology, Roadmap, Lithography
Citation
Issues
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Created April 14, 2014, Updated October 12, 2021