Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.

Https

The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

2013 ITRS Metrology Roadmap

Published

Author(s)

Alain C. Diebold, Ndubuisi G. Orji

Abstract

In 2013 the ITRS Metrology Technical Working Group worked on updating the text and tables of the metrology chapter. New additions include a section on 3D nanometrology, a revised lithography metrology table, and an updated Interconnect section. The difficult challenges table was revised to reflect current metrology needs and opportunities. This article discusses the new updates for 2013.
Citation
Apptheneum

Keywords

ITRS, Metrology, Roadmap, Lithography
Created April 15, 2014, Updated February 19, 2017