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A 0.1 GHz to 1.1 THz Inverted Grounded-CPW mTRL Calibration Kit Characterization in an InP HBT Process



Jerome Cheron, Rob Jones, Dylan Williams, Miguel Urteaga, Bryan Bosworth, Nick Jungwirth, Jeffrey Jargon, Ben Jamroz, Chris Long, Nate Orloff, Ari Feldman, Peter Aaen


We report a novel design approach of on-wafer multiline thru-reflect-line (mTRL) calibration kit fabricated on a commercial semiconductor-based transistor process that we validate from 0.1 GHz to 1.1 THz. The on-wafer calibration standards are designed with an innovative inverted grounded-coplanar waveguide (G-CPW) transmission line, where the calibration reference planes, buried under multiple layers of interconnects, provide direct access to the heterojunction-bipolar-transistor (HBT). We connect the different levels of ground-plane metallization with vias to avoid coupling with adjacent structures and limit the propagation of higher-order modes. We validate this approach with measurements of the complex characteristic impedance of the inverted G-CPW lines, the S-parameters of a 775 μm line, and a 600 GHz common-base amplifier.
Proceedings Title
Wireless and Microwave Technology Conference (WAMICON) 2024
Conference Dates
April 15-16, 2024
Conference Location
Clearwater Beach, FL, US


grounded-coplanar waveguide line (G-CPW), multiline thru-reflect-line (mTRL), on-wafer calibration, terahertz (THz) frequencies, S-parameters


Cheron, J. , Jones, R. , Williams, D. , Urteaga, M. , Bosworth, B. , Jungwirth, N. , Jargon, J. , Jamroz, B. , Long, C. , Orloff, N. , Feldman, A. and Aaen, P. (2024), A 0.1 GHz to 1.1 THz Inverted Grounded-CPW mTRL Calibration Kit Characterization in an InP HBT Process, Wireless and Microwave Technology Conference (WAMICON) 2024, Clearwater Beach, FL, US, [online],, (Accessed June 17, 2024)


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Created May 13, 2024, Updated June 10, 2024