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Vincent Kotsubo (Assoc)

Publications

Design of a 3000 pixel transition-edge sensor x-ray spectrometer for microcircuit tomography

Author(s)
Paul Szypryt, Douglas Bennett, William J. Boone, Amber L. Dagel, G Dalton, William Doriese, Malcolm Durkin, Joseph Fowler, Edward Garboczi, Jonathon D. Gard, Gene Hilton, Jozsef Imrek, E S. Jimenez, Vincent Y. Kotsubo, K Larson, Zachary H. Levine, John Mates, D McArthur, Kelsey Morgan, Nathan J. Nakamura, Galen O'Neil, Nathan Ortiz, Christine G. Pappas, Carl Reintsema, Dan Schmidt, Daniel Swetz, K R. Thompson, Joel Ullom, C Walker, Joel C. Weber, Abigail Wessels, J W. Wheeler
Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex
Created July 30, 2019, Updated June 30, 2022