Research over the past ten years into atomic sensors has allowed for controlled ensembles of room temperature atoms in such a manner that we are able to develop interesting and unique devices. Beside SI traceable E-ﬁeld probes, other applications range from atom-based receivers to imaging capabilities to many others. Because of the numerous potential applications of this new sensor technology, several groups around the world have begun programs in the area of Rydberg atom-based detectors/sensors/receivers (including universities, private companies, government agencies and most of the national metrology institutes around the world). In order for these atomic sensors to become commercially feasible, economic designs and fabrication processes are needed. The sensor can be cost effectively produced using batch microfabrication and novel machines and fabrication processes.
The following novel features are invented: (1) placing thin-narrow layer of silicon (Si) onto glass windows such that they can be anodic bounded to small glass cells, (2) drill holes in plates of glass in order to make single or an array of vapor cells for which windows are anodically bounded, and (3) novel process for filling and anodically bounding windows to glass cells.