A Simple Metric for Determining Resolution in Optical, Ion, and Electron Microscope Images

Published

May 26, 2015

Author(s)

Alexandra Curtin, Aric W. Sanders, Ryan Skinner

Abstract

A resolution metric intended for the resolution analysis of arbitrary spatially calibrated images is presented in this paper. By fitting a simple sigmoidal function to the pixel intensities across slices of the image taken perpendicular to light-dark edges, the mean distance over which the light-dark transition occurs can be determined. A fixed multiple of this characteristic distance is then reported as the image resolution. The prefactor is determined by analysis of direct scanning transmission electron microscope high-angle annular dark field (STEM HADDF) images of Si[110]. This metric has been applied to optical, scanning electron microscope (SEM), and helium ion microscope (HIM) images. This method provides quantitative feedback about image resolution independent of the tool on which the data was collected.

Citation

Microscopy and Microanalysis

Volume

21

Issue

3

Pub Type

Journals

Download Paper

DOI Link

Keywords

resolution, precision imaging, microscopy

Citation

Curtin, A. , Sanders, A. and , R. (2015), A Simple Metric for Determining Resolution in Optical, Ion, and Electron Microscope Images, Microscopy and Microanalysis, [online], https://doi.org/10.1017/S1431927615000343 (Accessed October 10, 2025)