Brown, J.
, Wallis, T.
, Kabos, P.
, Bertness, K.
, Sanford, N.
and Bright, V.
(2013),
Radio-Frequency and DC Electrical Characterization on a Modular MEMS Mechanical Test Platform for Nanomaterials, Digest of the Transducers 2013 Conference, Barcelona, ES
(Accessed October 27, 2025)
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Radio-Frequency and DC Electrical Characterization on a Modular MEMS Mechanical Test Platform for Nanomaterials
Published
Author(s)
J. J. Brown, , , , , Victor Bright
Abstract
In order to enable radio frequency (RF) data collection from a micromechanical system designed to strain nanomaterials, a coplanar electrical waveguide has been integrated with an actuated microscale stage. RF (100 MHz to 20 GHz) admittance measurements obtained from this device demonstrate that the capacitance of an empty test stage decreases from 0.87 fF to 0.78 fF as the stage gap increases. Direct current (DC) photoconduction measurements demonstrate successful electrical interfacing to a suspended GaN nanowire (NW) that was placed on the stage by dielectrophoretic self-assembly.Proceedings Title
Digest of the Transducers 2013 Conference
Conference Dates
June 16-20, 2013
Conference Location
Barcelona, ES
Pub Type
Conferences
Keywords
MEMS testers, coplanar waveguide, test platform, radio-frequency
Citation
Issues
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Created June 15, 2013, Updated October 12, 2021