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We have developed a MEMS (micro electro mechanical systems) -based method for fatigue testing of micro- to millimeter-sized specimens of any material (hence universal). The miniature, re- usable, stand-alone fatigue test frame is fabricated as a single MEMS chip. Specimens of any material can be manually mounted in the chip and fatigue-tested. We describe the design and construction of the MEMS device, specimens, the test protocol, and show S-N results for 25 micrometer thick Al 1145 H19 foil. The S-N results are in accord with expectation and examination of the fracture surface by scanning electron microscopy shows distinct regions corresponding to slow and fast crack growth.
Liew, L.
, Read, D.
and Barbosa, N.
(2012),
MEMS-based universal fatigue test technique, Experimental Mechanics, [online], https://doi.org/10.1007/s11340-012-9666-5
(Accessed October 7, 2025)