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PUBLICATIONS

Progress Report: 157 nm Excimer Laser Calorimeter Development

Published

Author(s)

Marla L. Dowell

Abstract

Progress report for sponsors. Progress on 157 nm calorimeter project is summarized. Data from prototype calorimeters is presented.
Citation
SEMATECH Tech. Rpt.
Pub Type
Others

Citation

Dowell, M. (2001), Progress Report: 157 nm Excimer Laser Calorimeter Development, SEMATECH Tech. Rpt. (Accessed May 2, 2026)
Additional citation formats

Issues

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Created October 24, 2001, Updated January 27, 2020
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