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Electron Traps, Structural Change, and Hydrogen-Related SIMOX Defects
Published
Author(s)
J. F. Conley, Patrick M. Lenahan, Peter Roitman
Proceedings Title
Proc., IEEE International SOI Conference
Conference Dates
October 6-8, 1992
Conference Location
Ponte Vedra Beach, FL, USA
Pub Type
Conferences
Citation
Conley, J.
, Lenahan, P.
and Roitman, P.
(1992),
Electron Traps, Structural Change, and Hydrogen-Related SIMOX Defects, Proc., IEEE International SOI Conference, Ponte Vedra Beach, FL, USA
(Accessed October 17, 2025)