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PUBLICATIONS

Local Electrode Atom Probes: Prospects for 3D Atomic-Scale Metrology Applications in the Semiconductor and Data Storage Industries

Published

Author(s)

T F. Kelly, T T. Gribb, R L. Martens, D J. Larson, N Tabat, R J. Matyi, Thomas J. Shaffner
Proceedings Title
Characterization and Metrology for ULSI Technology
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences

Citation

Kelly, T. , Gribb, T. , Martens, R. , Larson, D. , Tabat, N. , Matyi, R. and Shaffner, T. (2001), Local Electrode Atom Probes: Prospects for 3D Atomic-Scale Metrology Applications in the Semiconductor and Data Storage Industries, Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA (Accessed October 15, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 31, 2001, Updated October 12, 2021
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