Mayo, S.
, Lowney, J.
and Roitman, P.
(1993),
Characterization of Interface Defects in SIMOX Films, Journal of Electronic Materials
(Accessed January 25, 2026)
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Characterization of Interface Defects in SIMOX Films
Published
Author(s)
, ,
Citation
Journal of Electronic Materials
Volume
22
Issue
2
Pub Type
Journals
Citation
Issues
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Created December 30, 1993, Updated October 12, 2021