Gaitan, M.
(2000),
MEMS Standardization, Proc., 6th International Micromachine Symposium, Tokyo, JA
(Accessed February 8, 2026)
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MEMS Standardization
Published
Author(s)
Abstract
Standardization and metrology are critical infrastructure needs for the MEMS industry. These needs incluse standard test structures and test methods, and standard reference materials. In addition to this, new protocols to disseminate standards and testProceedings Title
Proc., 6th International Micromachine Symposium
Conference Location
Tokyo, JA
Pub Type
Conferences
Keywords
MEMS, standards, MEMS foundary, test structures, microheating element
Citation
Issues
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Created December 31, 2000, Updated February 17, 2017