Diebold, A.
, Wollman, D.
, Hilton, G.
, Irwin, K.
, Martinis, J.
and Liu, B.
(1999),
Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis, Solid State Phenomena
(Accessed October 27, 2025)
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Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis
Published
Author(s)
Alain C. Diebold, , , , , B. H. Liu
Abstract
New microcalorimeter x-ray detector technology will revolutionize materials characterization. It is expected that the microcalorimeter EDS (energy dispersive spectrometer) will replace traditional lithium-drifted silicon semiconductor EDS due to its superior energy resolution (< 4 eV FWHM) and greatly enhanced capability for characterizing low energy x-rays. In this paper, we describe the transition-edge sensor microcalorimeter developed at NIST and demonstrate its superior capability using x-ray spectra of size, sub-micrometer-diameter particles on silicon surfaces.Citation
Solid State Phenomena
Volume
65-66
Pub Type
Journals
Keywords
energy dispersive spectrometer, microcalorimeter, x-ray
Citation
Issues
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Created November 30, 1999, Updated October 12, 2021