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PUBLICATIONS

Angular Distribution of Light Scattered From a Sinusoidal Grating

Published

Author(s)

Egon Marx, Thomas A. Germer, Theodore V. Vorburger, B C. Park

Abstract

The angular distributions of light scattered by gold-coated and aluminum-coated gratings having amplitudes of ~90 nm and periods of 6.67 ¿m were measured and calculated for light incident from a HeNe laser at an angle of 6E. Experimental results are compared with predictions of Beckmann's scalar theory and Rayleigh's vector theory. The measured scattering pattern has a background of scattered light due mainly to residual surface roughness. Also the power in the higher-order peaks is larger by several orders of magnitude than the computed one, which can be attributed mainly to the low-order contributions of the harmonics in the profile.
Citation
Applied Optics
Volume
39(25)
Issue
No. 25
Pub Type
Journals

Keywords

BRDF instrument harmonics light scattering residual roughness sinusoidal grating stylus instrument
Manufacturing and Metrology

Citation

Marx, E. , Germer, T. , Vorburger, T. and Park, B. (2000), Angular Distribution of Light Scattered From a Sinusoidal Grating, Applied Optics (Accessed October 12, 2025)

Issues

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Created January 1, 2000, Updated February 19, 2017
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