The Challenges of Nanometrology

Published

January 1, 2002

Author(s)

Michael T. Postek

Abstract

The promise and challenge of nanotechnology is immense. The National Nanotechnology Initiative provides an opportunity to develop a new technological base for U.S. Industry. Nanometrology is the basis of the new measurement methods that must be developed to support the nanotechnology. Nanometrology has already played a key role in support for the semiconductor and other U.S. industries already developing products with nanometer-sized dimensions. Nanometrology techniques, standards and infrastructure development are needed to control fabrication and production, ensure product quality and enable different parts to work effectively together. Size and tolerance are important considerations and require standardization. Metrology is critical to developing a complete understanding of any new phenomenon or process. Only those things that can be measured can be fully understood. Ultimately, this understanding is critical to obtaining the immense economic benefits predicted by the National Nanotechnology Initiative for U.S. industry.

Citation

SPIE Meeting

Pub Type

Journals

Keywords

metrology, microscopy, modeling, molecular measuring machine, nanometer, scanning electron, standards

Citation

Postek, M. (2002), The Challenges of Nanometrology, SPIE Meeting (Accessed December 3, 2025)