Electron-Impact Total Ionization Cross Sections of SFx (x = 1-5)

Published

July 1, 2000

Author(s)

M A. Ali, Karl Irikura, Yong Sik Kim

Abstract

Total cross sections for electron impact ionization are necessary quantities for numerical modeling of plasma chemistry and for quantitative mass-spectrometric gas analysis. Theoretical cross sections for SF, SF₂, SF₃, SF₄, and SF₅ are calculated by the recently developed binary-encounter- Bethe (BEB) model. The BEB model combines a modified form of the Mott cross section and the Bethe cross section. The results are compared with experimental cross sections for SF₃ and SF₅ free radicals. In view of the success of the BEB method for SF₆ and many other molecules, it is expected that the results presented here will provide reliable total ionization cross sections for SF_x, x = 1-5.

Citation

International Journal of Mass Spectrometry

Volume

201

Issue

No. 1-3

Pub Type

Journals

Keywords

cross section, electron impact, ionization, mass spectrometry, plasma modeling, theory

Citation

Ali, M. , Irikura, K. and Kim, Y. (2000), Electron-Impact Total Ionization Cross Sections of SF_x (x = 1-5), International Journal of Mass Spectrometry (Accessed May 8, 2026)

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