NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

High Resolution X-Ray Scattering Methods for ULSI Materials Characterization

Published

Author(s)

R J. Matyi

Abstract

X-ray analytical methods with high angular resolution are becoming increasingly important for the characterization of materials used in ULSI fabrication. Vendors now market state-of -the-art X-ray tools for the routine analysis of parameters such as layer thickness, chemical composition, strain relaxation, and interfacial roughness. The recent integration of X-ray diffraction and reflectivity systems into fab-compatible process metrology tools suggests that the importance of these techniques will only increase with time. Here we discuss some basic principles of high resolution X-ray methods (notably double-and triple-axis X-ray diffractometry and high resolution X-ray reflectometry) and will describe the capabilities and limitations of these tools for ULSI materials. Reference will be made to real-life problems involving bulk and thin-film structures (ranging from amorphous dielectrics and polycrystalline metals to highly perfect epitaxial single crystal materials) to show both the utility and the shortcomings of high resolution X-ray methods.
Citation
International Conference on Characterization and Metrology for ULSI Technology
Pub Type
Journals

Keywords

x-ray diffractometry ULSI materials char, x-ray reflectometry

Citation

Matyi, R. (2008), High Resolution X-Ray Scattering Methods for ULSI Materials Characterization, International Conference on Characterization and Metrology for ULSI Technology (Accessed October 11, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 16, 2008
Was this page helpful?